Nanosphere Lithography

Nanosphere Lithography

With courtesy of: Institute of Optoelectronic Sciences, National Taiwan Ocean University, Keelung, Taiwan Professor : Doctor Hai-Pang Chiang Candidate for doctor's degree : Wen-Chi Lin & Chang-Long Chen

Spheres on surface
5x5µm image, z-range: 200nm
 Surface after patterning
5x5µm image, z-range: 40nm