A versatile atomic force microscope integrated with a scanning electron microscope

Review of Scientific Instruments 88, 053704 (2017)

J. Kreith, T. Strunz, E. J. Fantner, G. E. Fantner, and M. J. Cordill

A versatile atomic force microscope (AFM), which can be installed in a scanning electron microscope (SEM), is introduced. The flexible design of the instrument enables correlated analysis for different experimental configurations, such as AFM imaging directly after nanoindentation in vacuum. In order to demonstrate the capabilities of the specially designed AFM installed inside an SEM, several application examples are shown.

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