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Dynamic force measurement on silicon wafer

Steps on (111) oriented silicon wafer.

Imaged with a Nanosurf easyScan DFM by Martin Eckstein. Advanced Lab Course 20, Augsburg University, EKM, Experimentalphysik 6.

10x10µm image, z-range: 38.8nm

The image shows steps on
(111) oriented silicon wafer. The measurement was performed in "Dynamic Force" operating mode.