Appl. Phys. Lett. 111, 093104 (2017)
Bekim Osmani, Saman Seifi, Harold S. Park, Vanessa Leung, Tino Töpper, and Bert Müller
Dielectric elastomer transducers (DETs) have attracted interest as generators, actuators, sensors, and even as self-sensing actuators for applications in medicine, soft robotics, and microfluidics. Their performance crucially depends on the elastic properties of the electrode-elastomer sandwich structure. The compressive displacement of a single-layer DET can be easily measured using atomic force microscopy (AFM) in the contact mode.
Flex-ANA automated data data acquisition and analysis software running on a FlexAFM system was used to extract the indentationdepths for each measurement.
